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Diaphragm Micro Vacuum Pumps
1014 Series

  • Capacity up to 0.02 cfm / 0.53 l/min 
  • Vacuum up to 47% local barometer / 14.75 in.Hg / -500 mbar
  • Capable of restarting up to 14.75 in.Hg / -500 mbar
  • Restart at temperatures down to -20°C possible
  • Special versions on request

Features & Benefits

Possible Applications

Downloads